原子分解能収差補正STEMと低加速への発展

書誌事項

タイトル別名
  • Aberration Corrected STEM in Atomic Resolution and Resolution Enhancement in Low-Voltage Microscope
  • ゲンシ ブンカイノウ シュウサ ホセイ STEM ト テイカソク エ ノ ハッテン

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抄録

The geometrical limitations of resolution caused by third-order spherical aberration were overcome with the development of practical aberration correctors. Spherical aberration correctors for probe-forming systems have been widely used in high-resolution structural and analytical studies. The performance of the microscope at medium acceleration voltages was sufficiently improved for resolving the atomic position and performing chemical analysis on an atomic level. We demonstrated that a low voltage microscope had the ability to facilitate atomic-resolution imaging and analytical study.

収録刊行物

  • 表面科学

    表面科学 34 (5), 240-246, 2013

    公益社団法人 日本表面科学会

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