SiCショットキーダイオードの特性と欠陥の関係

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タイトル別名
  • Relationship between Characteristics of SiC-SBD and Surface Defect
  • SiC ショットキーダイオード ノ トクセイ ト ケッカン ノ カンケイ

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抄録

The good relations between the reverse characteristics of 4H-SiC JBS diodes and the surface defects were obtained. The reverse characteristics of 4H-SiC JBS diodes were categorized in three groups as follows : (A) low blocking voltage, (B) high leakage current and (C) low leakage current. The groups of (A) and (B) were caused by the existences of the micropipe and small particles, and the carrot-like defects on the SiC surfaces, respectively. In group (C), nanosized circular cone shaped pits (nanopits) were observed at the leakage current sources. The positions of nanopits corresponded to the positions of threading dislocations.

収録刊行物

  • 表面科学

    表面科学 35 (2), 84-89, 2014

    公益社団法人 日本表面科学会

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