書誌事項
- タイトル別名
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- Sample Surface and Near-surface Analysis by Confocal 3D XRF Spectrometer
- ソウサガタ キョウ ショウテン ケイコウ Xセン ブンセキホウ ニ ヨル シリョウ ヒョウメン オヨビ ヒョウメン キンボウ ノ 3ジゲン ゲンソ ブンセキ
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We have developed a confocal 3D-XRF spectrometer in combination with polycapillary X-ray lenses and a laboratory X-ray source. The depth resolutions of the 3D-XRF configuration estimated by scanning of Au and Cr thin foils were approximately 50 μm for AuLα, and 100 μm for CrKα, respectively. The capacity of the depth-sensitive analysis of the confocal setup was investigated by scanning a thick plastic reference sample concluding trace metals of Ti, Cr, Co and Pb. The depth sensitivity in deeper region was significantly decreased than that in the surface region because of the absorption of X-ray irradiation and X-ray fluorescence in the material. The calculated LLD values of Cr at each depth were 9.4 mg/kg at 300 μm, 23 mg/kg at 500 μm, 38 mg/kg at 700 μm, 77 g/kg at 900 μm, and 110 mg/kg at 1100 μm, respectively. 3D elemental analysis with the confocal XRF setup was demonstrated for an electrical Cu cable covered with PVC. The 3D elemental images agreed well with the actual distributions of the sample. The confocal 3D-XRF has a great advantage for 3D elemental analysis as well as nondestructive depth analysis at ambient pressure.
収録刊行物
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- 表面科学
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表面科学 31 (7), 331-336, 2010
公益社団法人 日本表面科学会
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詳細情報 詳細情報について
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- CRID
- 1390282681435888000
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- NII論文ID
- 10026871814
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- NII書誌ID
- AN00334149
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- ISSN
- 18814743
- 03885321
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- NDL書誌ID
- 10771528
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 抄録ライセンスフラグ
- 使用不可