Reaction of Tungsten with Silicon Tetrachloride

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  • タングステンと四塩化珪素の反応
  • タングステン ト 4エンカ ケイソ ノ ハンノウ

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Abstract

The conditions of formation of tungsten silicides, when tungsten powder or stoichiometric mixed powders of WSi2 and W3Si2 were heated in hydrogen or silicon tetrachloride- containing atmospheres, were examined by chemical and X-ray analysis. Above 1000°C,tungsten powder reacted with silicon tetrachloride and formed WSi2 in a hydrogen atmosphere,but did not react in a neutral atmosphere even at 1300°. In the case of mixed powders, the cilicides were formed above 1300° in pure hydrogen gas, but at a lower temperature, such as 900°C, in both hydrogen and neutral atmospheres mixed with silicon tetrachloride gas. The X-ray diffraction lines of WSi2 and W3Si2 showed a good agreement throse reported in the past. The silicide “W3Si2” showed tetragonal structure and not D88-structure.

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