フラーレン薄膜を利用した透明導電膜の形成

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  • Formation of a Transparent Electroconductive Film Derived from Fullerene Thin Film
  • フラーレン ハクマク オ リヨウ シタ トウメイ ドウデンマク ノ ケイセイ

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  Recently, with increase of demand of flat panel displays, it is required to develop a transparent electroconductive film without using a rare metal. In this study, we carried out the formation of a transparent electroconductive film derived from fullerene. C60 was evaporated on a quartz substrate, and then we irradiate ultraviolet light on the films for 72 or 120 h, respectively. After the irradiation, nickel thin film formed on the C60 film, and then heat-treatment was carried out in an electric furnace with a vacuum of 10−4 Pa. Raman spectra showed that C60 films were polymerized by ultraviolet light irradiation. Although polymerized C60 films tended to become amorphous structure by heat-treatment of 873 K for 10 min, the films covered with nickel as a catalyst tended to be graphitized by the same treatment. The obtained films indicated transparency, and the minimum electrical resistivity was 10−3 Ω cm.<br>

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