Effect of Annealing on Residual Stress in Amorphous B-N-C Films Prepared by Low Pressure CVD Method
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- Sakakihara Masahiko
- Magnetic & Electronic Materials Research Laboratory, Hitachi Metals Ltd.
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- Ichinose Yukio
- Nagaoka University of Technology
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- Yamaguchi Sadae
- Institute for Materials Research, Tohoku University
Bibliographic Information
- Other Title
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- 減圧CVD法により成膜したアモルファスB-N-C膜の残留応力に対するア二ール効果
- 減圧CVD法により成膜したアモルファスB-N-C膜の残留応力に対するアニール効果
- ゲンアツ CVDホウ ニ ヨリ セイマクシタ アモルファス B N C マク
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Abstract
Amorphous BN (a-BN) films are very promising materials for the mask membrane of X-ray lithography because of their high transparency to X-rays. Characteristics of films used for the mask menbrane demand the tensile stress to Si-wafer substrate and the high optical transmittance to the He-Ne laser used for mask alignment.<BR>It was, however, very difficult to obtain a-BN films fully satisfying such requirements as mentioned above. We tried adding carbon to a-BN films and, as the result, obtained the conditions to produce a-BNC films suitable for the mask membrane. It is naturally considered that a-BNC films as deposited change their characteristics by annealing. Then, we investigated the effects of anneal on stress in films. Vacuum-annealing over the deposition temperature resulted in the decrease of stress for a-BNC films contrary to the increase of stress in a-BN films. This fact is so well corresponding to the result that the amount of the bonded hydrogen increased in a-BNC films but decreased in a-BN films. On the other hand, for the relationship between the intrinsic stress and the total hydrogen in a-BNC films deposited at various temperatures, the stress increased with increasing total hydrogen which was opposed to the behavior of a-BN films.
Journal
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- Journal of the Japan Institute of Metals and Materials
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Journal of the Japan Institute of Metals and Materials 56 (4), 459-463, 1992
The Japan Institute of Metals and Materials
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Details 詳細情報について
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- CRID
- 1390282681466635904
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- NII Article ID
- 130007340662
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- NII Book ID
- AN00187860
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- ISSN
- 18806880
- 24337501
- 00214876
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- NDL BIB ID
- 3769674
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed