書誌事項
- タイトル別名
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- Microwear Properties of Silicon Single Crystal and the Wear Structure
- シリコンタンケッショウ ノ マイクロ マモウ トクセイ ト マモウ ソシキ
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説明
Microtribology of silicon single crystals is one of the important factors for the practical use of microelectromechanical system (MEMs). In this study, the effect of crystal orientation on microwear of silicon single crystal and the wear structure were investigated. Microfriction experiments using atomic force/friction force microscope (AFM/FFM) were carried out to investigate the effect of crystal orientation on the microwear depth of silicon single crystals. In these experiments, the scanning directions of a tip of AFM/FFM were ⟨100⟩ and ⟨110⟩ on Si(100) surface and ⟨112⟩ on Si(111) surface. Diamond and Si3N4 tips were used to generate the normal force of 200 and 5 μm, respectively. It was found that the depth of the wear traces generated on silicon surfaces increased in the following order: ⟨112⟩, ⟨100⟩, ⟨110⟩. Cross-sectional TEM observations of the microwear traces were carried out. It was found that small dislocation loops and lattice defects were generated in the surface region at the first stage of the microwear, and the size and the number of dislocations increased with the progress of the microwear.
収録刊行物
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- 日本金属学会誌
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日本金属学会誌 67 (6), 269-273, 2003
公益社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390282681466725248
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- NII論文ID
- 130007340783
- 10011457126
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- NII書誌ID
- AN00187860
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- ISSN
- 18806880
- 24337501
- 00214876
- http://id.crossref.org/issn/00214876
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- NDL書誌ID
- 6627695
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
- OpenAIRE
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- 抄録ライセンスフラグ
- 使用不可