Au-Ag合金とAlとの接合部の拡散挙動および接合信頼性に及ぼす影響

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タイトル別名
  • Diffusion Behavior and Reliability in bonds between Au-Ag alloy and Aluminum
  • Au-Ag ゴウキン ト Al ト ノ セツゴウブ ノ カクサン キョドウ オヨビ セツゴウ シンライセイ ニ オヨボス エイキョウ

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The replacement of conventional pure Au bonding wires by highly-alloyed Au-Ag ones in LSI semiconductors can reduce significantly material cost. However, Au-Ag wires have not yet been used due to a failure problem at the bonding points between the Au-Ag balls and Al thin film pads. Therefore, to apply Au-Ag wires to LSI products, the improvement of the thermal reliability at the bonding points between Au-Ag/Al is very important.<BR>The thermal reliability of the Au-Ag/Al bonds depends on the Ag concentration (CAg) in Au wires. A certain range of CAg showing good bond reliability was found. Ball bonds of Au-14 at%Ag produced a significant degradation after annealing. On the contrary, bonds of Au-24 at%Ag provided as good a reliability as the commercial pure Au wire after annealing at 473 K for 1000 hr. Thus, the optimization of the Ag concentration in the Au-Ag alloy wires was significantly effective in improving the bond reliability.<BR>Diffusion behavior at the bond interface of the Au-Ag/Al was different from that of pure Au/Al. It was characteristic that AuAl2 grew predominantly in the interface of the Au-Ag/Al. The formation of intermetallic compounds varies with CAg. The dependence of the intermetallic compounds (Au5Al2, AuAl2, Ag2Al) on the Ag concentration dominated the bond reliability.

収録刊行物

  • 日本金属学会誌

    日本金属学会誌 63 (12), 1545-1554, 1999

    公益社団法人 日本金属学会

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