Real-Time Measurement of Nanometer Displacement Distribution by Integrated Phase-Shifting Method
-
- FUJIGAKI Motoharu
- Department of Opto-Mechatronics, Faculty of Systems Engineering, Wakayama University
-
- MORIMOTO Yoshiharu
- Department of Opto-Mechatronics, Faculty of Systems Engineering, Wakayama University
-
- YABE Masato
- Graduate School of Systems Engineering, Wakayama University
この論文をさがす
説明
Phase-shifting methods are advantageous for analyzing phases of fringe patterns obtained by interferometry. Conventional phase-shifting methods usually use three or four images obtained by phase-shifting. If only one camera is used for three or four images, the fringe images are recorded with phase-shifting disruption so that the brightness does not change during the camera exposure time. The stopping procedure obstructs the speed of the measurement system. We proposed a new method that takes four images for phase analysis without disrupting phase-shifting. The method is called the integrated phase-shifting method (IPSM), and is suitable for real-time phase analysis. In this method, four images are recorded continuously with full-exposure time during phase-shifting. In this paper, the development of a real-time phase analysis circuit using this theory and an application to nanometer-order displacement distribution measurement of a micro-accelerometer manufactured by micro-machining techniques are shown.
収録刊行物
-
- JSME International Journal Series A Solid Mechanics and Material Engineering
-
JSME International Journal Series A Solid Mechanics and Material Engineering 45 (3), 448-452, 2002
一般社団法人 日本機械学会
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1390282681470582656
-
- NII論文ID
- 10016190492
-
- NII書誌ID
- AA11179396
-
- ISSN
- 13475363
- 13447912
-
- NDL書誌ID
- 6223208
-
- 本文言語コード
- en
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可