高真空～超高真空測定の基礎

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書誌事項

タイトル別名
  • Fundamentals of pressure measurements in high and ultrahigh vacua.
  • コウ シンクウ チョウ コウ シンクウ ソクテイ ノ キソ

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抄録

Hot cathode ionization gauges are widely used for the pressure measurements in high and ultrahigh vacua. This review covers the fundamental techniques for the measurement of pressures by ionization gauges. The indications of ionization gauges are proportional to the molecular density and the gauges require calibration. The gauges can be compared with an absolute gauge or they can be attached to a system in which a known standard pressure can be generated. Characteristics of diaphragm gauges, spinning rotor gauges, and ionization gauges are reviewed in conjunction with the reference transfer gauges for the standard pressures.

収録刊行物

  • 核融合研究

    核融合研究 55 (6), 461-475, 1986

    社団法人 プラズマ・核融合学会

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