Synthesis of Aligned Carbon Nanowalls Using Radio-Frequency Plasma Enhanced Chemical Vapor Deposition

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  • HIRAMATSU Mineo
    Department of Electrical and Electronic Engineering, Faculty of Science and Technology, Meijo University
  • HORI Masaru
    Department of Electrical Engineering and Computer Science, Graduate School of Engineering, Nagoya University

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Other Title
  • プラズマプロセスによるカーボンナノチューブ配向成長の現状と課題　　５．ＲＦプラズマＣＶＤによるカーボンナノウォールの配向成長
  • RFプラズマCVDによるカーボンナノウォールの配向成長
  • RF プラズマ CVD ニ ヨル カーボンナノウォール ノ ハイコウ セイチョウ

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Carbon nanowalls, self-assembled two-dimensional carbon nanostructures standing vertically on the substrate, were fabricated using capacitively coupled, radio-frequency, fluorocarbon plasma-enhanced chemical vapor deposition assisted by H radical injection. The correlation between carbon nanowall growth and the fabrication conditions was investigated. The morphologies and growth rate of carbon nanowalls were dependent on the types of carbon source gases and the amount of H radicals injected. In addition, straight, aligned carbon nanowalls with regular spacing were fabricated by controlling the radical flow configuration.

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