Cutting on a Nano Machine
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- SAWADA Kiyoshi
- FANUC Co. LTD
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- KAWAI Tomohiko
- FANUC Co. LTD
Bibliographic Information
- Other Title
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- 超高精度微細加工への挑戦 制御と計測 ナノマシンにおける高精度切削加工 新工作機械の提案
- 新工作機械の提案
Journal
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- Journal of The Society of Instrument and Control Engineers
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Journal of The Society of Instrument and Control Engineers 41 (11), 794-798, 2002
The Society of Instrument and Control Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390282681494113920
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- NII Article ID
- 130003697660
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- ISSN
- 18838170
- 04534662
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles