Nano-Scale Fabrication Using Optical-Near-Field

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  • Yatsui Takashi
    School of Engineering, The University of Tokyo
  • Ohtsu Motoichi
    School of Engineering, The University of Tokyo Nanophotonics Research Center, The University of Tokyo

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  • 近接場光を利用した新しい光励起系によるナノ材料加工技術
  • キンセツバ コウ オ リヨウ シタ アタラシイ ヒカリ レイキ ケイ ニ ヨル ナノ ザイリョウ カコウ ギジュツ

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This paper reviews the specific nature of nanophotonics, i.e., a novel optical nano-technology, utilizing dressed photon excited in the nano-material. As examples of nanophotnic fabrication, optical near-field etching and increased spatial homogeneity of contents in compound semiconductors is demonstrated with a self-organized manner.<br>

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