Electrochemical fabrication processes for functional micro and nano scale structures

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  • 電気化学的手法による機能マイクロ・ナノ構造体形成プロセス
  • デンキ カガクテキ シュホウ ニ ヨル キノウ マイクロ ・ ナノ コウゾウタイ ケイセイ プロセス

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Abstract

<p>Electrochemical processes for micro and nano scale fabrication were overviewed and some of the recent results including these processes were described. By using an electrodeposition process in combination with patterned substrates, ferromagnetic nanodot arrays, which were applicable to bit patterned media for ultra high-density data storage devices, were prepared. Also, a templated electrochemical etching process for a Si single crystal wafer, which could form an array of micro scale pores with controlled dimensions and suitable for the fabrication of arrays of glass tubes or metal needles, was described.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 81 (5), 406-409, 2012-05-10

    The Japan Society of Applied Physics

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