Alignment techniques and circuit applications of nanowires
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- WAHO Takao
- Faculty of Science and Technology, Sophia University
Bibliographic Information
- Other Title
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- ナノワイヤの堆積プロセスと回路応用
- ナノワイヤ ノ タイセキ プロセス ト カイロ オウヨウ
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Abstract
<p>To overcome performance limitations due to difficulties in the scaling-down of semiconductor devices, novel approaches, such as involving new materials and structures, have been attracting increasing attention. This article first describes a process technique based on dielectrophoresis. This is successfully applied to InAs nanowire alignment onto a host semiconductor substrate. Simple circuit applications, such as an inverter and a track-and-hold circuit, as well as a MISFET, are then presented.</p>
Journal
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- Oyo Buturi
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Oyo Buturi 81 (12), 1015-1019, 2012-12-10
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390282752335709440
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- NII Article ID
- 10031131312
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- NII Book ID
- AN00026679
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- ISSN
- 21882290
- 03698009
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- NDL BIB ID
- 024153415
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- CiNii Articles
- KAKEN
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- Abstract License Flag
- Disallowed