Understanding of Atomic and Molecular Scattering from Surfaces
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- Sasaki Masahiro
- Fac. Pure and Appl. Sci., Univ. Tsukuba TREMS, Univ. Tsukuba
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- Yamada Yoichi
- Fac. Pure and Appl. Sci., Univ. Tsukuba
Bibliographic Information
- Other Title
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- 表面における原子・分子散乱の理解
Abstract
<p>The surface effect to the gas flow in a vessel cannot be ignored. The scattering from the surface has been studied for a long time as a major subject. In this paper, I will introduce the understanding at present of atomic and molecular scattering from surfaces.</p>
Journal
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- Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
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Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2019 (0), 3Fp09-, 2019
The Japan Society of Vacuum and Surface Science