Measurement of inner geometry of fine glass hole by indirect replica method

DOI

Bibliographic Information

Other Title
  • レプリカ法によるガラス微小穴内部形状の間接測定
  • 2<SUP>nd</SUP> Report: Comparison to direct measurement of cross-sectional inner glass shape along the longitudinal axis
  • 第２報：縦軸切断面直接測定との比較

Abstract

<p>This paper describes a comparison of the replica method with the cross-sectional measurement method for measuring the inner glass shape along the longitudinal axis. The former utilizes indirect measurement, while the latter uses direct measurement. In our experiment, we first made a hole through a glass plate. Next, we made a replica of the hole and measured its outer surface with a non-contact measurement instrument to obtain the ridge line height of the replica. In order to measure the internal dimensions of the glass hole, we first cut the glass hole exactly in half longitudinally and exposed the inner surface. Then, we measured the inner dimensions of the hole and calculated the depth of the groove. Finally, we confirmed that the depth of the groove corresponded to the ridge line height. In conclusion, the replica method is as effective as the cross-sectional measurement method for measuring the inner shape of small glass holes.</p>

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282752357586816
  • NII Article ID
    130007740355
  • DOI
    10.11420/jsat.63.245
  • ISSN
    18807534
    09142703
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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