3J3-4 The improvement of temperature characteristics for highly coupled ZnO/Quartz structure(Piezoelectric Devices)

DOI

Bibliographic Information

Other Title
  • 3J3-4 高結合ZnO/水晶構造デバイスにおける温度特性改良(圧電デバイス)

Abstract

Recent years, several applications require radio frequency filters which have narrow bandwidth with high attenuation. ZnO film/quartz structure has a good potential to satisfy those requirements. This paper shows the optimization of ZnO/quartz structure to obtain nearly zero temperature coefficient of frequency (TCF)with maximizing electro-mechanical coupling coefficient (k^2). In the former papers which one of the authors reported about ZnO/quartz structure, nearly zero TCF with small electro-mechanical coupling coefficient, or maximized k^2 with non-zero TCF was reported. However, both zero TCF and maximized k^2 have not been simultaneously obtained. The authors estimate the optimized structure by calculation and confirm it by measurement also.

Journal

Details 詳細情報について

  • CRID
    1390282763070811904
  • NII Article ID
    110007721860
  • DOI
    10.24492/use.30.0_601
  • ISSN
    24331910
    13488236
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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