3J3-4 The improvement of temperature characteristics for highly coupled ZnO/Quartz structure(Piezoelectric Devices)
-
- Murata Takaki
- Murata Manufacturing Co., Ltd.:Grad. School of Eng., Chiba Univ.
-
- Kadota Michio
- Murata Manufacturing Co., Ltd.
-
- Matsuda Kenji
- Murata Manufacturing Co., Ltd.
-
- Kimura Tetsuya
- Murata Manufacturing Co., Ltd.
-
- Hashimoto Ken-ya
- Grad. School of Eng., Chiba Univ.
Bibliographic Information
- Other Title
-
- 3J3-4 高結合ZnO/水晶構造デバイスにおける温度特性改良(圧電デバイス)
Abstract
Recent years, several applications require radio frequency filters which have narrow bandwidth with high attenuation. ZnO film/quartz structure has a good potential to satisfy those requirements. This paper shows the optimization of ZnO/quartz structure to obtain nearly zero temperature coefficient of frequency (TCF)with maximizing electro-mechanical coupling coefficient (k^2). In the former papers which one of the authors reported about ZnO/quartz structure, nearly zero TCF with small electro-mechanical coupling coefficient, or maximized k^2 with non-zero TCF was reported. However, both zero TCF and maximized k^2 have not been simultaneously obtained. The authors estimate the optimized structure by calculation and confirm it by measurement also.
Journal
-
- Proceedings of Symposium on Ultrasonic Electronics
-
Proceedings of Symposium on Ultrasonic Electronics 30 (0), 601-602, 2009-11-18
Institute for Ultrasonic Elecronics
- Tweet
Details 詳細情報について
-
- CRID
- 1390282763070811904
-
- NII Article ID
- 110007721860
-
- ISSN
- 24331910
- 13488236
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- CiNii Articles
-
- Abstract License Flag
- Disallowed