Study on high efficiency of GaN polishing process; 2nd report
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- Matsui Shinsuke
- Chiba Institute of Technology
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- Suzuki Takuma
- Chiba Institute of Technology
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- Yajima Toshiyasu
- MARUISHI SANGYO CO., LTD.
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- Ninomiya Daisuke
- MARUISHI SANGYO CO., LTD.
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- Yamamoto Eiichi
- OKAMOTO MACHINE TOOL WORKS, LTD.
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- Ito Toshihiro
- OKAMOTO MACHINE TOOL WORKS, LTD.
Bibliographic Information
- Other Title
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- GaN研磨加工高能率化の研究（第2報）
- 小型研磨機を用いた反射型光路による紫外線照射とpH変化の効果
- Effect of ultraviolet irradiation and various pH by reflective optical path using a small polishing machine
Description
<p>石英定盤を用いて反射光路を形成し直接研磨部位に紫外線が照射される小型研磨機によってGaNの研磨速度の改善の検討を行った。本報ではさらに様々なpHでの影響の調べた。</p>
Journal
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- Proceedings of JSPE Semestrial Meeting
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Proceedings of JSPE Semestrial Meeting 2018A (0), 305-306, 2018-08-20
The Japan Society for Precision Engineering
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Keywords
Details 詳細情報について
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- CRID
- 1390282763101356800
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- NII Article ID
- 130007602817
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed
