書誌事項
- タイトル別名
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- Investigation of Polishing Characteristics of Metal-Containing Porous Platen
抄録
In recent years, demand for sapphire substrate is expected. Sapphire has characteristics of high hardness, high strength, high heat resistance, high corrosion resistance and high permeability, and therefore it is applied to various machines. Copper and tin platens are used for polishing of sapphire substrates. However, sapphire is said to be poorly processed due to difficult processing materials. Therefore, we will conduct a material characteristic and polishing characteristic of sapphire substrate using a copper platen currently used for processing and a newly developed metal containing porous platen, and compare and investigate the polishing characteristics.
収録刊行物
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- 茨城講演会講演論文集
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茨城講演会講演論文集 2018.26 (0), 711-, 2018
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390282763110449024
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- NII論文ID
- 130007637428
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- ISSN
- 24242683
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可