Development of Large-scale Superconducting-tunnel-junction Array X-ray Detectors for Nanoscale Elemental Mapping

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  • FUJII Go
    National Institute of Advanced Industrial Science and Technology (AIST), Nanoelectronics Research Institute
  • UKIBE Masahiro
    National Institute of Advanced Industrial Science and Technology (AIST), Nanoelectronics Research Institute
  • SHIKI Shigetomo
    National Institute of Advanced Industrial Science and Technology (AIST), Nanoelectronics Research Institute
  • OHKUBO Masataka
    National Institute of Advanced Industrial Science and Technology (AIST), Nanoelectronics Research Institute

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  • ナノスケールでの元素分析に向けた 大規模超伝導トンネル接合アレイX 線検出器の開発
  • ナノスケール デ ノ ゲンソ ブンセキ ニ ムケタ ダイキボ チョウデンドウ トンネル セツゴウ アレイ Xセン ケンシュツキ ノ カイハツ

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<p>Superconducting-tunnel-junction (STJ) array X-ray detectors can exhibit excellent performance with respect to energy resolution, detection efficiency, and counting rate in a soft X-ray energy range. The detection area of STJ array detectors for high throughput analysis should be enlarged up to more than 10 mm2 by increasing the pixel number of the arrays. In this work, in order to realize a STJ array with a large number of pixels up to 1000 within a 10-mm-square chip, we successfully fabricated STJ arrays arranging STJ pixels at high density. For the arrays, a wiring layer is embedded in a SiO2 isolation layer underneath the STJ pixels. A STJ array detector with 100 pixels has an operation yield of 93% and a mean energy resolution of 12.5 +/- 0.7 eV in full-width at half-maximum for a C-Kα X-ray. The 12.5 eV is close to the natural line width of C in matrices, which means that the intrinsic energy resolution is a few eV. The detection performance was almost the same as those of conventional 100-pixel STJ array detectors. In addition, we developed an energy-dispersive X-ray spectroscopy analyzer combined with a scanning electron microscope (SEM) and the STJ array X-ray detector to realize nano-scale elemental mapping with high energy-resolving power. The analyzer simultaneously exhibits a high throughput of silicon drift detectors and a high energy resolution of wavelength-dispersive X-ray spectrometers.</p>

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