Present Status and Future Prospects of Aberration Corrected TEM/STEM

DOI 55 References

Bibliographic Information

Other Title
  • 収差補正TEM/STEMの現状と今後の展望

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Description

<p>Since the latter part of 1990, aberration correction technology, particularly of spherical aberration correction, has been developed. Its installation first started on TEM and next on STEM, which realized the point-to-point resolution of electron microscopes less than 0.1 nm. Recently, chromatic aberration correction instruments are also developed in Germany and Japan. The next targets of electron microscopy are the point-to-point resolution less than 0.04 nm (=40 pm) and three-dimensional observation at atomic dimension. The present paper reviews the history and present status of aberration corrected electron microscopy in order to see the future prospects.</p>

Journal

  • KENBIKYO

    KENBIKYO 46 (3), 175-180, 2011-09-30

    The Japanese Society of Microscopy

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Details 詳細情報について

  • CRID
    1390283659832799488
  • NII Article ID
    10029694817
  • NII Book ID
    AA11917781
  • DOI
    10.11410/kenbikyo.46.3_175
  • ISSN
    24342386
    13490958
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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