サスペンション・フリー型ミラーの光変調素子

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  • 南條 健
    （株）リコー イノベーション本部 先端デバイス研究センター

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タイトル別名
  • Light Modulation Element with Suspension-free Mirror
  • サスペンション ・ フリーカタ ミラー ノ ヒカリ ヘンチョウ ソシ

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<p>The development of light modulation element with suspension-free mirror is reported. The feature of the device is that the mirror is not supported by hinges on the substrate. In other words, the mirror is suspension-free. We reported the operating principle and the results in the past as a two-dimensional MEMS (Micro Electro Mechanical Systems) mirror array device. This device has the advantage of being fine and fast because it has no restoring force, so it can be expected to be used in light modulators of holographic displays with 1µm pixel size. Because the mirror is suspension-free and contact somewhere constantly, the main problem of this device is sticking. This time, we changed drastically materials of the device. As a result, it was possible to suppress charging sticking, and a mirror tilt corresponding to light modulation of 52 ° was confirmed at low voltage of 5 V with a mirror having a side length of 10 µm. </p>

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