Efficient detection device for wafer physical defects

DOI
  • Chen Jianyong
    College of Electronic Information and Automation, Tianjin University of Science and Technology
  • Chen Xiaoyan
    College of Electronic Information and Automation, Tianjin University of Science and Technology
  • Zhao Chundong
    College of Electronic Information and Automation, Tianjin University of Science and Technology

説明

Wafer defect detection is an important part of semiconductor manufacturing. In order to improve the efficiency of semiconductor wafer defect detection, this paper designs an efficient visual inspection device. The device uses programmable logic controller (PLC) as controller for the transmission mechanism and uses servo motor as drive device. A CMOS camera is used to capture wafer images, a computer is used for wafer image processing, and results are displayed on a graphical user interface. Camera calibration is implemented by integrating the mapping relationship between the pixel coordinate system and the world coordinate system, the internal and external parameters of the camera and the distortion coefficient. The device proposed in this paper is low in cost and the detection process is stable and reliable. It provides a new solution for wafer defect detection.

収録刊行物

キーワード

詳細情報 詳細情報について

  • CRID
    1390283659853033344
  • DOI
    10.5954/icarob.2020.os15-1
  • ISSN
    21887829
  • 本文言語コード
    en
  • データソース種別
    • JaLC
    • Crossref
  • 抄録ライセンスフラグ
    使用不可

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