作用表面上におけるナノスケール現象の化学的実時間観測に関する研究

DOI

書誌事項

タイトル別名
  • Study on Real-time Chemical Observation during On-Surface Nanoscale Process
  • 1st report: Development of Evanescent field Raman Spectroscopy System
  • 第１報：ラマン分光光度計の開発

抄録

<p>This paper reports development of an optical apparatus for Real-time observation during chemical reactions in Nano-scale process on surface such as CMP (Chemical-Mechanical polishing) and catalysis by applying in evanescent field. Beside using evanescent field to observe Nano-particles in physical aspects, the developed Raman spectroscopy apparatus aims to observe chemical aspects during reactions on processing surface. Changes in Raman scattering spectrum is expected to understand chemical reactions on the processing surface. In this report, the 532 nm wavelength laser source will be used to generate evanescent field. A rotation stage of diffraction grating and a translation stage will used to optimize the Raman spectrum data.</p>

収録刊行物

キーワード

詳細情報 詳細情報について

  • CRID
    1390285697601788160
  • NII論文ID
    130007896772
  • DOI
    10.11522/pscjspe.2020s.0_622
  • 本文言語コード
    en
  • データソース種別
    • JaLC
    • CiNii Articles
  • 抄録ライセンスフラグ
    使用不可

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