Silicon based plasmonic MEMS device for light control and detection

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  • 光を操るシリコンプラズモンアンテナMEMS技術
  • ヒカリ オ アヤツル シリコンプラズモンアンテナ MEMS ギジュツ

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Abstract

<p>To make use of surface plasmon resonance (SPR) in electronic applications, we have incorporated micro (nano) metal plasmonic antennas into silicon MEMS sensors and devices that measure and manipulate light. The states of SPR on the antenna can be detected on a silicon MEMS chip by converting hot electrons to a current through a silicon-metal junction. In this paper, we introduce a silicon infrared detector that we have been developing based on this principle. Then, applications of the antenna are presented including a circularly polarized filter using spiral-shaped antennas and a miniature spectrometer that combines a variable cantilever with a grating antenna.</p>

Journal

  • Oyo Buturi

    Oyo Buturi 89 (11), 651-655, 2020-11-10

    The Japan Society of Applied Physics

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