Reliability test of a micro heater for thermal type MEMS flow sensor

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  • 熱式MEMSフローセンサに用いられるマイクロヒータの信頼性の検討

Abstract

<p>Reliability of a micro heater for thermal type MEMS flow sensor is assessed. The micro heater is on membrane and made of poly-Si. Thermal stress is applied by self-heat generation under a bias voltage. Its temperature of the heater is calculated with its resistance increase under the bias voltage and TCR (Temperature Coefficient of Resistance). Two ways of biasing stress are tested. One way is to apply voltage continuously to test normal acceleration factor on basis of the Arrhenius model. The other way is to apply voltage as pulse wave (200 msec period time, 50% duty ratio) to verify degradation effect due to mechanical cyclic stress. The heat generation as thermal stress is set from + 420 degree C to + 620 degree C. The Arrhenius plot tells that the activation energy Ea of the micro heater is 1.13 eV (continuous voltage) and 1.16 eV (pulse-wave voltage). It means that the heater has enough life time for product use and is not mainly affected by mechanical cyclic stress.</p>

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