グラフェンを用いたひずみ制御高感度ガス選択センサの開発

  • 喬 向宇
    東北大学大学院工学研究科ファインメカニクス専攻
  • 張 秦強
    東北大学大学院工学研究科ファインメカニクス専攻
  • 鈴木 研
    東北大学大学院工学研究科附属先端材料強度科学研究センター
  • 三浦 英生
    東北大学大学院工学研究科附属先端材料強度科学研究センター

書誌事項

タイトル別名
  • Development of a Strain-controlled Graphene-based Highly Sensitive Gas Sensor

抄録

<p>The excellent properties of graphene make it a broad prospect in gas sensing, but the lack of gas selectivity largely limits its practical application. By first-principle calculation, it was found that strain changes the surface free energy of graphene, thereby affects the gas adsorption behavior on the graphene surface. For water molecules and carbon monoxide molecules, the adsorption energy increased with strain. In addition, when the applied strain reached about 5%, the adsorption energy of carbon monoxide changed from a negative value to a positive value, in other words, desorption started to occur under the applied strain. This result suggests that the selectivity of graphene can be improved by control of strain. In this study, in order to verify the feasibility of this theory, a graphene flexible sensor was developed. The graphene was synthesized by using chemical vapor deposition and was transferred onto a PDMS substrate using wet transfer method. Then, electrodes were deposited using electron beam evaporation. Raman spectroscopy was used for the characterization of the quality of graphene and it was found that the monolayer graphene was successfully transferred to the target substrate. Finally, the change of its resistance was validated under strain and H2O, respectively.</p>

収録刊行物

  • 年次大会

    年次大会 2020 (0), J22208-, 2020

    一般社団法人 日本機械学会

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