Enhancement of speed of surface roughness improvement by using a two mixed abrasive slurry method to polish glass surfaces

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  • ２種混合砥粒研磨法を用いたガラス基板研磨加工による表面粗さ改善速度の向上
  • 2シュ コンゴウトリュウ ケンマホウ オ モチイタ ガラス キバン ケンマ カコウ ニ ヨル ヒョウメン アラサ カイゼン ソクド ノ コウジョウ

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Abstract

<p>This study was performed to find a method to reduce the consumption of expensive diamond abrasive grains in polishing glass substrates, and to mix low-hardness abrasives with diamond abrasives to reduce costs and achieve early improvement of surface roughness. The effects of the size of the GC abrasives (approximately 127 μm, 75 μm, and 13 μm), abrasive concentration, and types of abrasives (WA and B4C) were clarified for low-hardness abrasives. The abrasive grains were fluorescently stained with rhodamine B to determine their behavior on the polished surface in-situ. The results indicated improved surface roughness by using two types of mixed abrasive grains. In addition, the large-grain GC abrasives moved or were shown to be trapped in the gaps of the fibers of the natural silk polishing pad used for polishing. On the other hand, diamond grains with an average grain size of 1.0 μm moved between the natural silk polishing pad and the glass substrate regardless of the fiber orientation.</p>

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