RFプラズマ処理によりステンレスの窒化

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In this work, we examined the nitriding of stainless steel with a plasma irradiation method using RF plasma equipment, which can be operated at lower temperatures than DC plasma. The RF plasma nitriding treatment was performed in 70％N2+30％H2 mixed gas atmosphere and the relationship between the application of the nitriding treatment and the surface hardness was then examined. We used SUS304 and SUS430 with the thickness of 100 μm as the stainless steel. The results showed that the nitriding treatment was successfully performed by plasma irradiation with 70％N2+30％H2 gas. The formation of iron nitride and chromium nitride were confirmed by RF plasma nitriding of each stainless steel. Measurements of the surface hardness showed that SUS304 having 420 HV before the treatment had a maximum hardness of 730 HV, and SUS430 having 280 HV before the treatment had a maximum hardness of 1215 HV.

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