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Development of phase separation sputtering technology using the kinetic energy of sputtered particles
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- Tanaka Ayumu
- National Institute of Technology, Miyakonojo College
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- Noguchi Daisuke
- National Institute of Technology, Miyakonojo College
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- Teramura Kyosuke
- MITSUI MINING & SMELTING CO., LTD.
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- Yano Tomoyasu
- MITSUI MINING & SMELTING CO., LTD.
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- Kurihara Michiko
- Takachiho Shirasu
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- Kondo Chieko
- Takachiho Shirasu
Bibliographic Information
- Other Title
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- スパッタ粒子の運動エネルギーを利用した相分離スパッタ技術の開発
Description
<p>We focused on Shirasu, a volcanic eruption unique to southern Kyushu, as a new antifogging material. To date, we have confirmed that the film exhibits superhydrophilicity when thinned by the sputtering method. The superhydrophilic property can be applied to antifogging technology, but maintaining the antifogging property has been an issue. We have been trying to maintain the antifogging property for a long time by making the thin film structure porous using the phase separation phenomenon of glass. However, the phase separation phenomenon, which generally requires heat treatment, cannot be applied to substrates with poor heat resistance, for which demand is increasing. The purpose of this study is to develop a phase separation sputtering technique for Shirasu thin films at low temperatures. Instead of thermal energy, we attempted to utilize the kinetic energy of the sputtered particles which affects the thin film structure. Specifically, the effect of deposition conditions on the kinetic energy of sputtered particles and the variation of the component chemical composition ratio of the thin film with respect to the kinetic energy were investigated.</p>
Journal
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- Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
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Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2021 (0), 2P17S-, 2021
The Japan Society of Vacuum and Surface Science
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Details 詳細情報について
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- CRID
- 1390290493075973504
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- NII Article ID
- 130008134135
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- ISSN
- 24348589
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed