Low damage radical oxidation of gold nanoparticle plasmon
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- Watanabe Kazuyasu
- National Defense Academy
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- Kitajima Takeshi
- National Defense Academy
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- Nakano Toshiki
- National Defense Academy
Bibliographic Information
- Other Title
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- 金ナノ粒子プラズモンによるシリコンの低ダメージラジカル酸化
Abstract
<p>Plasmon, a gold nanoparticle, has been attracting attention in recent years. We have applied plasmons of gold nanoparticles to reduce damage to the plasma-irradiated surface due to ionic impact and to utilize it for the formation of high-quality ultrathin films. This time, we investigated the effect of silicon on radical oxidation at room temperature.</p>
Journal
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- Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science
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Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2021 (0), 2Ca08-, 2021
The Japan Society of Vacuum and Surface Science
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Details 詳細情報について
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- CRID
- 1390290493077713152
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- NII Article ID
- 130008134121
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- ISSN
- 24348589
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
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- Abstract License Flag
- Disallowed