Low damage radical oxidation of gold nanoparticle plasmon

DOI

Bibliographic Information

Other Title
  • 金ナノ粒子プラズモンによるシリコンの低ダメージラジカル酸化

Abstract

<p>Plasmon, a gold nanoparticle, has been attracting attention in recent years. We have applied plasmons of gold nanoparticles to reduce damage to the plasma-irradiated surface due to ionic impact and to utilize it for the formation of high-quality ultrathin films. This time, we investigated the effect of silicon on radical oxidation at room temperature.</p>

Journal

Details 詳細情報について

  • CRID
    1390290493077713152
  • NII Article ID
    130008134121
  • DOI
    10.14886/jvss.2021.0_2ca08
  • ISSN
    24348589
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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