2重坩堝ACRT法における供給原料の混入過程及び融液温度への影響

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  • Mixing mechanism of the supplied raw material and effects of the raw material on melt temperature in a double-crucible Czochralski system using the accelerated crucible rotation technique
  • 2ジュウ ルツボ ACRTホウ ニ オケル キョウキュウ ゲンリョウ ノ コンニュウ カテイ オヨビユウエキ オンド エ ノ エイキョウ

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The transport-mechanism of supplied raw material in a double-crucible Czochralski. system using the accelerated crucible rotation technique (ACRT) was investigated by three-dimensional and time-dependent numerical simulation. The calculation clarified that use of the ACRT resulted in enhancement of the mixing effect of the supplied raw material. It is therefore possible to maintain the composition of the melt in an inner crucible during crystal growth by using the ACRT. The effect of the continuous charge of the raw material on melt temperature was also investigated. Our results showed that the effect of feeding lithium niobate granules on melt temperature was small, since the feeding rate of the granules is small. Therefore, solidification of the melt surface due to the heat effusion in this system is not likely.

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