ITO/AgPd/ITO Laminated Films for High-performance Transparent Thin Film Heaters

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  • OSHIRO Tomoyoshi
    Graduate School of Science and Engineering, Aoyama Gakuin University
  • KASHIWAGI Makoto
    Graduate School of Science and Engineering, Aoyama Gakuin University
  • OGUCHI Yuki
    Center for Instrumental Analysis, College of Science and Engineering, Aoyama Gakuin University
  • ISHII Kanji
    Advanced Material and Processing Laboratory, Research Division, Nissan Motor Co., Ltd.
  • NOGUCHI Yuji
    Advanced Material and Processing Laboratory, Research Division, Nissan Motor Co., Ltd.
  • SHIGESATO Yuzo
    Graduate School of Science and Engineering, Aoyama Gakuin University

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Other Title
  • ITO/AgPd/ITO積層膜を用いた高性能透明薄膜ヒーターの開発
  • ITO/AgPd/ITO セキソウマク オ モチイタ コウセイノウ トウメイ ハクマク ヒーター ノ カイハツ

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Abstract

<p>We successfully fabricated the high-performance transparent thin film heaters using ITO/AgPd/ITO laminated films with various thickness combinations and investigated their optical, electrical, structural and heating properties in detail. The surface temperature rise rate (TRR) from 0 to 7 seconds for the ITO (200 nm)/AgPd (10 nm)/ITO (200 nm) under the applied voltage of 6.0 V was 16℃/s, where the temperature reached over 300℃ within 20 sec. The transmittance at 550 nm of this heater was 81%, where the sheet resistance was 4.2 Ω/□. The cross-sectional HREM analyses revealed that the bottom and top ITO films showed quite different polycrystalline structures after the temperature rising tests, which can be explained by the solid-phase and vapor-phase crystallizations, respectively.</p>

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