Evaluation of chemical bonding state of AlScN using AR-XPS
-
- Tsujiguchi Ryota
- Integrative Science and EngineeringTokyo City Univ.
-
- Sai Syorin
- Tokyo Institute of Technology.
-
- Kakushima Kuniyuki
- Tokyo Institute of Technology.
-
- Nohira Hiroshi
- Tokyo City Univ.
Bibliographic Information
- Other Title
-
- AR-XPSを用いたAlScNの化学結合状態の評価
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2020.2 (0), 885-885, 2020-08-26
The Japan Society of Applied Physics
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390291932641349760
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC