Performance Comparison between Atomic-layer-deposited Al2O3/HfO2 Nanolaminate and Parylene C for Implantable Devices with High Step Coverage Using Accelerated Life Testing

DOI

Journal

Keywords

Details 詳細情報について

  • CRID
    1390291932641853312
  • DOI
    10.18494/sam3727
  • ISSN
    24350869
    09144935
  • Text Lang
    en
  • Data Source
    • JaLC
    • Crossref

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