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Wafer Warpage Prediction of Si Trench MOSFET using Multi-Scale Stress Analysis
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- Ito Kazuyuki
- Toshiba
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- Oda Tatsuhiro
- Toshiba
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- Kikuchi Takuo
- Toshiba
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- Kitahara Yoshiyuki
- Toshiba
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- Yabuhara Hidehiko
- Toshiba
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- Nishiguchi Toshifumi
- Toshiba Electronic Devices & Storage
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- Katou Hiroaki
- Toshiba Electronic Devices & Storage
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- Shimomura Saya
- Toshiba Electronic Devices & Storage
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- Nishiwaki Tatsuya
- Toshiba Electronic Devices & Storage
Bibliographic Information
- Other Title
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- マルチスケール応力解析手法を用いたSiトレンチMOSFETのウエハ反り予測
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.2 (0), 1921-1921, 2020-08-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390291932663533312
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC