Fabrication of SAW resonators on single-crystal diamonds using Minimal-Fab process III
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- Fujii Satoshi
- NIT, Okinawa Coll.
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- Toonoe Haruki
- Yokogawa S.S.
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- Shiba Yasunori
- Yokogawa S.S.
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- Dario Manelli
- TCK
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- Tokuda Motoi
- TCK
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- Ooe Takashi
- TCK
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- Kosaka Koji
- TCK
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- Hara Shiro
- AIST
Bibliographic Information
- Other Title
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- ミニマルファブプロセスによるダイヤモンドSAWデバイスの作製(３)
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 2659-2659, 2020-02-28
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390292240167432192
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC