Improvement in dielectric constant of SrTiO<sub>3</sub> thin film formed by multi-step liquid phase deposition
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- Hyakkan Shogo
- Graduate School of Eng., Yokohama National Univ.
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- Arakawa Taro
- Graduate School of Eng., Yokohama National Univ.
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- Haneji Nobuo
- Graduate School of Eng., Yokohama National Univ.
Bibliographic Information
- Other Title
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- 繰り返し液相堆積SrTiO<sub>3</sub>薄膜の誘電率向上の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 1387-1387, 2020-02-28
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390292240182978816
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC