Deposition of AlN thin film using minimal RF-sputtering machine
-
- Hotta Masaya
- HORIBA STEC
-
- Nishizato Hiroshi
- HORIBA STEC
-
- Toonoe Haruki
- YOKOGAWA S.S.
-
- Shiba Ikunari
- YOKOGAWA S.S.
-
- Maeda Takuya
- N.I.T. Okinawa call.
-
- Odo Yuki
- N.I.T. Okinawa call.
-
- Fujii Satoshi
- N.I.T. Okinawa call.
Bibliographic Information
- Other Title
-
- ミニマルRFマグネトロンスパッタリング装置によるAlN薄膜の形成(2)
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2021.1 (0), 2312-2312, 2021-02-26
The Japan Society of Applied Physics
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390292472573314944
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC