Dielectric constants of MgF<sub>2</sub> films deposited by rf sputtering
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- Ogura Kohei
- Aoyama Univ.
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- Kashiwagi Makoto
- Aoyama Univ.
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- Jia Junjun
- Waseda Univ.
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- Machinaga Hironobu
- Nitto Denko
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- Shigesato Yuzo
- Aoyama Univ.
Bibliographic Information
- Other Title
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- rfスパッタリングによるMgF<sub>2</sub>薄膜の作製と誘電関数解析
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 1605-1605, 2019-09-04
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390292815284579456
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
