Effect of fast- and slow-shear wave components on attenuation of LLSAW propagating on ScAlN film/quartz
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- Suzuki Masashi
- Univ. of Yamanashi
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- Kakio Shoji
- Univ. of Yamanashi
Bibliographic Information
- Other Title
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- ScAlN薄膜/水晶基板上縦型リーキーSAWの伝搬減衰に速い横波,遅い横波成分が及ぼす影響の理論的検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.1 (0), 408-408, 2019-02-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390293202186630144
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC