GaN surface treatment of TMAH with varying dilution solvent
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- Imakuma Go
- Kyutech
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- Uzaki Kouta
- Kyutech
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- Shinkai Satoko
- CMS
Bibliographic Information
- Other Title
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- 希釈溶媒を変化させたTMAH溶液によるGaN表面処理
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 3257-3257, 2018-03-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390293655509168768
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
