Growth of AlGaN films with high Al mole fractions by pulsed sputtering
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- Sakurai Yuya
- IIS, the Univ. of Tokyo
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- Ueno Kohei
- IIS, the Univ. of Tokyo
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- Kobayashi Atsushi
- IIS, the Univ. of Tokyo
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- Fujioka Hiroshi
- IIS, the Univ. of Tokyo JST-ACCEL
Bibliographic Information
- Other Title
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- パルススパッタ堆積法による高Al組成AlGaN薄膜成長
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.1 (0), 3579-3579, 2018-03-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390293655509377792
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC