Application of Monolithic Ion Exchange resins for the field of Ultrapure Water

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  • モノリス状イオン交換体の超純水分野への適用

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<p>Ultrapure water (UPW) is used in various industries such as semiconductor manufacturing, nuclear power generation, medical and pharmaceutical industry, biotechnology, and chemical analysis. In particular, UPW has an extremely important role in the rinsing procedure for semiconductor manufacturing. In recent years, due to the miniaturization of devices, together with further purification of UPW, quality control at very low concentrations is also required. We synthesized a porous ion exchange resin with continuous holes (Monolithic ion exchange resin) which can be used for water treatment and synthetic catalysts. It was confirmed that the monolithic ion exchange resin shows a high ion exchange rate due to the large specific surface area as compared with the conventional ion exchange resins. We verified the application as an ion concentrator for trace metal analysis of UPW and established a pg/L (ppq) level analysis technology.</p>

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