Effects of Liquid Cluster Ion Beam on Transition Metal Thin Films
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- Shimizu Daiki
- Kyoto Univ.
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- Yamamoto Daisuke
- Kyoto Univ.
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- Takeuchi Mitsuaki
- Kyoto Univ.
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- Ryuto Hiromichi
- Kyoto Univ.
Bibliographic Information
- Other Title
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- 遷移金属薄膜に対する液体クラスターイオンビームの照射効果
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.2 (0), 1660-1660, 2017-08-25
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390293943108869504
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC