Effect of quasi-atmospheric pressure plasma irradiation on p-GaN surface
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- Kumagai Naoto
- GaN-OIL, AIST ESPRIT, AIST
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- Itagaki Hirotomo
- AMRI, AIST
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- Kim Jaeho
- ESPRIT, AIST
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- Ogiso Hisato
- AMRI, AIST
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- Wang Xuelun
- GaN-OIL, AIST ESPRIT, AIST
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- Hirose Shingo
- AMRI, AIST
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- Sakakita Hajime
- GaN-OIL, AIST ESPRIT, AIST
Bibliographic Information
- Other Title
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- p-GaN表面への準大気圧プラズマ照射の効果
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.2 (0), 3423-3423, 2017-08-25
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390293943110406528
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC