Thermal annealing effect on paramagnetic defects in silicon nitride films(Ⅳ)
-
- Kazumi Osamu
- Grad.School.Eng.,Tokai Univ.
-
- Kabayashi Kiyoteru
- Grad.School.Eng.,Tokai Univ.
Bibliographic Information
- Other Title
-
- シリコン窒化膜の常磁性欠陥に対する熱処理の効果(Ⅳ)
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2017.1 (0), 2900-2900, 2017-03-01
The Japan Society of Applied Physics
- Tweet
Keywords
Details 詳細情報について
-
- CRID
- 1390294186614708864
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC