Evaluation of GaN wafer for power devices by Kelvin probe Force Microscopy(1)
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- Uchida Yuuki
- CIT
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- Yasuno Mitsuhiro
- CIT
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- Suzuki Tatuki
- CIT
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- Uchimori Mizuki
- CIT
Bibliographic Information
- Other Title
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- パワーデバイス用GaNウエハの表面電位顕微鏡による評価(1)
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2017.1 (0), 3620-3620, 2017-03-01
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390294186615308672
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC