Current state of AES Chemical state analysis

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  • オージェ電子分光による化学状態分析の現状

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Field emission type Auger Electron Spectrometer (FE-AES) can provide the micro area analysis of the several 10nm, by developing Auger Electron Spectroscopy (AES) equipped with an electron gun of thermal field emission source (TFE). The conventional features of AES are sensitive to surface layer and possible for in depth analysis. Moreover, FE-AES can perform the micro area analysis and the chemical state analysis by using the high energy resolution energy analyzer. In this review, the new application data of Auger chemical state analysis are reported.

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